The plasma source 22 of the system 10 may be a surface-wave plasma (SWP) source that includes a radial line slot antenna 24. The plasma source 22 may be energized by direct current, radio frequency, microwave energy, or other energy sources known to the art. Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. Simulation of microwave pulsing in a radial line slot ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna. On the Near-Field Shaping and Focusing Capability of a ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION
Design of Radial Line Slot Antennas at 8.3 GHz for Large Area ...
Jun-ichi Takada - Google Scholar Citations Plasma processing apparatus. N Ishii, Y Kobayashi, N Goto, ... A reflection cancelling slot set in a linearly polarized radial line slot antenna. J Takada, M Ando, ... 2018 IEEE International Symposium on Antennas and Propagation ... Mar 2, 2018 ... 2699, A 60-GHZ INTEGRATED SLOT LOOP ANTENNA IN 0.13-µM .... THE COMPLEX PERMITTIVITY OF TIME-VARYING PLASMA ...... DISTRIBUTION OF CIRCULARLY POLARIZED RADIAL LINE SLOT ARRAY ANTENNAS. voltage breakdown of antennas at high altitudes - DTIC Nov 3, 1971 ... Data from measurements made with a plasma caused by a DC discharge over a 380-Mc slot antenna are prosented, illustrating this effect. Ways to improve ...... and Herlin and Brown. 1 In coaxial lines the radial field varies. 21 ...
APS/URSI 2017 | 2017 IEEE International Symposium on Antennas…
the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these
Плазменная антенна — активно разрабатываемый тип радиоантенн, в которых вместо металлических проводников для приёма и передачи радиоволн используется ионизированный газ — плазма.
A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source ... 9 Optimization of Radial Line Slot Array Antenna Feeder Design for ... Optimization of Radial Line Slot Array Antenna Feeder Design for Direct Broadcast Satellite Services. By. Stephen Badu ... Radial Line Slots Array (LP- RLSA) Antenna Feeders design are used ..... plasma generation,” Antennas Propag. Soc. (PDF) Radial Line Slot Array (RLSA) Antenna Design at 28 GHz Using ... Oct 5, 2018 ... PDF | A radial line slot array antenna is presented and experimentally discussed for ... application,” IEEE Transactions on plasma science, vol. TEL Releases New 300mm Trias SPA | Notification | Tokyo Electron Ltd.
INTRODUCTION Nowadays, the radial line slot antenna (RLSA) represents one of the most interesting planar radiating structures for its low cost, high efficiency, and mass-producible features. In the field of microwave and millimeter-wave applications, RLSA is considered an attractive candidate...
A method and apparatus are disclosed employing electron cyclotron resonant (ECR) heating to produce plasma for applications including but not limited to chemical vapor deposition and etching. US5131409A - Device for microwave resonance therapy - Google… The device in accordance with the invention is an apparatus for producing electromagnetic radiation for use in microwave resonance therapy. This device provides improved selectivity of the effect produced by electromagnetic radiation in … US3573840A - Small bulk helically wound antennae and method for…
power in the radial line slot antenna source was 3000 W and the flow rate of arsine was 0.7 sccm diluted in 999.3 sccm he-lium with a process pressure of 150 mTorr. SIMS measured profiles for blanket wafer (fin top) doping are presented in Fig. 1 for both pre- and post-anneal conditions. Figure 2 is a On the Near-Field Shaping and Focusing Capability of a Radial ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION Microwave power coupling in a surface wave excited plasma density plasma can form with an ion sheath layer along the antenna. Then the microwave was fed into the coaxial wave-guide from the right side of the system. Now the input microwave power could propagate easily along the negative biased antenna and surface wave excited plasma generated along the antenna inside the chamber. Simulation of microwave pulsing in a radial line slot antenna ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna.